---
title: VMS2HA – High Accuracy Portable Automatic Calibration System
description: High Accuracy model from a new family of calibration systems 
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date: 2026-09-04T22:18:47Z
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VMS2HA (High Accuracy) is a High Accuracy model from a new family of calibration systems developed by Vacuum Metrology Systems. The VMS2 family design builds on experience and customer feedback gained during the development and production of our AVCS system.

VMS2HA is a truly portable, fully automatic calibration system for onsite calibration of vacuum gauges for the semiconductor, pharmaceutical, aerospace, and many other industries. In addition to portability and unsurpassed accuracy, VMS2HA offers a built-in Calibration Management Software suite to ensure compliance with ISO 90XX, ISO/IEC 17025, ANSI Z540, and other industry-specific quality standards.

The system utilizes up to three high-accuracy NIST- or PTB-traceable vacuum transfer standards with a basic accuracy of up to 0.025%. The standards' coverage can be custom configured to provide the best accuracy throughout the required calibration pressure range. The proprietary pressure control algorithm allows for repeatable control resolution of up to 0.01% of the set point.

The VMS2HA system is fully compatible with the requirements of ISO 3567.

VMS2HA can be configured to utilize the Transfer Standards that your company already owns.

 



**High Accuracy Transfer Standards**  
Up to three NIST- or PTB-traceable standards, with a basic accuracy of up to ±0.025% of reading

**Number of Test Ports**  
3

**Base Pressure**  
Less than 7 × 10⁻⁵ Pa (5 × 10⁻⁷ Torr)

**Pressure Control Range**  
Fully automatic pressure control from 1.3 × 10⁻³ to 1.3 × 10⁵ Pa (1 × 10⁻⁵ to 1 × 10³ Torr)

**Pressure Control Resolution**  
Up to 0.01% of setpoint

**Operating Modes**  
Automatic, Semi-Automatic, Manual Service

**Data Averaging**  
10 to 99 points

**Thermal Transpiration Correction**  
On/Off for Standards and/or UUTs  
(Calculations per the Takaishi-Sensui formula)

**Process/Calibration Gas**  
Nitrogen or Dry Air

**Dry Pumping System**  
Scroll and turbomolecular pumps

**Fully Enclosed Cabinet**  
Eliminates temperature variations and reduces uncertainty contributions caused by temperature drift

**Cleanroom Compatibility**  
Fully compatible

**ISO Compliance**  
Fully compliant with ISO 3567: Vacuum Gauges — Calibration by Direct Comparison with a Reference Gauge

**Data and System Security**  
Secure databases for clear audit trail:

- process recipes
- calibration data
- Event logs
 
**Calibration Management Software Suite**

- Create and print Calibration Certificates
- View and track calibration history and trends
- Create and save unlimited calibration and UUT recipes
 
**Power Requirements**  
110/230 VAC, 50/60 Hz, 15A



## VMS2HA Ordering Information

  
![VMS2HA Ordering Information](https://www.vacuummetrology.com/images/vms2ha-oi.jpg)

\* If you plan to use your own standards, please consult our Sales Department.

### **Examples:**

**VMS2HA-3-210-Y-AP**

- Three standards: 100 Torr, 10 Torr, and 1 Torr, with a basic accuracy of ±0.05%
- 0 to 10 VDC input for UUTs for automatic data collection
- ±15 VDC linear power supply for UUTs
 
**VMS2HA-0-10K-X-M**

- The System will be pre-configured to use your own 1000T, 100T, 1T standards with Basic  
    Accuracy of ±0.08%.
- Manual data input for all UUT types
 
### **Options description:**

**Option A – 0 to 10 VDC Inputs for UUTs**  
The system captures readings from gauges with 0 to 10 VDC full-scale analog outputs. This option supports most capacitance manometers (also known as capacitance diaphragm gauges). It may be used in conjunction with the optional ±15 VDC linear power supply (see Option P).

**Option P – ±15 VDC Linear Power Supply**  
Provides the required power for up to three capacitance manometers without the need for external controllers or power supplies.

**Option C – 4 to 20 mA Inputs for UUTs**  
The system captures readings from gauges with 4 to 20 mA full-scale analog outputs.

**Option R – RS-232/485 Inputs for UUTs**  
The system captures readings from gauges with RS-232/485 outputs. Additional commands, such as zeroing, can also be programmed for automatic execution.

**Option M – Manual Data Input**  
The system is configured for manual data entry for all UUT types.

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