VMS2HA (High Accuracy) is a High Accuracy model from a new family of calibration systems developed by Vacuum Metrology Systems. The VMS2 family design builds on experience and customer feedback gained during the development and production of our AVCS system.
VMS2HA is a truly portable, fully automatic calibration system for onsite calibration of vacuum gauges for the semiconductor, pharmaceutical, aerospace, and many other industries. In addition to portability and unsurpassed accuracy, VMS2HA offers a built-in Calibration Management Software suite to ensure compliance with ISO 90XX, ISO/IEC 17025, ANSI Z540, and other industry-specific quality standards.
The system utilizes up to three high-accuracy NIST- or PTB-traceable vacuum transfer standards with a basic accuracy of up to 0.025%. The standards' coverage can be custom configured to provide the best accuracy throughout the required calibration pressure range. The proprietary pressure control algorithm allows for repeatable control resolution of up to 0.01% of the set point.
The VMS2HA system is fully compatible with the requirements of ISO 3567.
VMS2HA can be configured to utilize the Transfer Standards that your company already owns.
High Accuracy Transfer Standards
Up to three NIST- or PTB-traceable standards, with a basic accuracy of up to ±0.025% of reading
Number of Test Ports
3
Base Pressure
Less than 7 × 10⁻⁵ Pa (5 × 10⁻⁷ Torr)
Pressure Control Range
Fully automatic pressure control from 1.3 × 10⁻³ to 1.3 × 10⁵ Pa (1 × 10⁻⁵ to 1 × 10³ Torr)
Pressure Control Resolution
Up to 0.01% of setpoint
Operating Modes
Automatic, Semi-Automatic, Manual Service
Data Averaging
10 to 99 points
Thermal Transpiration Correction
On/Off for Standards and/or UUTs
(Calculations per the Takaishi-Sensui formula)
Process/Calibration Gas
Nitrogen or Dry Air
Dry Pumping System
Scroll and turbomolecular pumps
Fully Enclosed Cabinet
Eliminates temperature variations and reduces uncertainty contributions caused by temperature drift
Cleanroom Compatibility
Fully compatible
ISO Compliance
Fully compliant with ISO 3567: Vacuum Gauges — Calibration by Direct Comparison with a Reference Gauge
Data and System Security
Secure databases for clear audit trail:
- process recipes
- calibration data
- Event logs
Calibration Management Software Suite
- Create and print Calibration Certificates
- View and track calibration history and trends
- Create and save unlimited calibration and UUT recipes
Power Requirements
110/230 VAC, 50/60 Hz, 15A
VMS2HA Product Brochure
VMS2HA Ordering Information
* If you plan to use your own standards, please consult our Sales Department.
Examples:
VMS2HA-3-210-Y-AP
- Three standards: 100 Torr, 10 Torr, and 1 Torr, with a basic accuracy of ±0.05%
- 0 to 10 VDC input for UUTs for automatic data collection
- ±15 VDC linear power supply for UUTs
VMS2HA-0-10K-X-M
- The System will be pre-configured to use your own 1000T, 100T, 1T standards with Basic
Accuracy of ±0.08%. - Manual data input for all UUT types
Options description:
Option A – 0 to 10 VDC Inputs for UUTs
The system captures readings from gauges with 0 to 10 VDC full-scale analog outputs. This option supports most capacitance manometers (also known as capacitance diaphragm gauges). It may be used in conjunction with the optional ±15 VDC linear power supply (see Option P).
Option P – ±15 VDC Linear Power Supply
Provides the required power for up to three capacitance manometers without the need for external controllers or power supplies.
Option C – 4 to 20 mA Inputs for UUTs
The system captures readings from gauges with 4 to 20 mA full-scale analog outputs.
Option R – RS-232/485 Inputs for UUTs
The system captures readings from gauges with RS-232/485 outputs. Additional commands, such as zeroing, can also be programmed for automatic execution.
Option M – Manual Data Input
The system is configured for manual data entry for all UUT types.